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Centura 5200 / 5300
Precision 5000

Spacer Broadway Engineering is a Leading Supplier of Refurbished Applied Materials® Equipment and Service for the Semiconductor Industry.

Broadway Engineering offers completely refurbished Applied Materials® Etch, CVD and PVD systems at a significant savings over the cost of a new unit, without sacrificing quality. All of our refurbished systems are guaranteed to meet or exceed the original published manufactured specifications. All of these systems include installation and warranty.

Broadway Engineering can supply many configurations of the Endura 5500, Centura 5200 / 5300 and P5000. System mainframe types are: RTP (Rapid Thermal Process), DCVD (Dielectric CVD), WCVD (Tungsten CVD), Tungsten Etch Back and Dielectric Etch. This also includes configuring your system to your specific wafer size with a variety of options.

Take a look and see what Broadway Engineering can offer you.


Applied Materials<sup>®</sup> Endura 5500
5500 Spacer
Endura PVD Processes
box Spacer Standard Aluminum (Al)
box Spacer Planarized Hot Aluminum
box Spacer (HTHU)
box Spacer Standard Titanium (Ti)
box Spacer Coherent Titanium (Coh Ti)
box Spacer Dedicated Titanium Nitride (TiN)
box Spacer Titanium / Titanium Nitride (TTN)
box Spacer Coherent Titanium / Titanium Nitride (Coh TTN)
box Spacer Titanium Tungsten (TiW)
box Spacer Tungsten (W)
Endura Chambers
box Spacer Standard Body Chamber
box Spacer Wide Body PVD Chamber
box Spacer Water Cooled PVD Chamber
box Spacer Paste Chamber (Ch-5)
box Spacer Preclean I / II chamber
box Spacer Orienter / Degas Chamber
box Spacer PVD Degas Chamber
box Spacer Vectra IMP
Endura System Options
box Spacer Specific Wafer Size Configuration
box Spacer Wide or Narrow Body Load Locks
box Spacer HP Motorized Lifts
box Spacer Single or Dual Orienter / Degas Chambers
box Spacer HP, HP+ or VHP Robots
box Spacer Fast Wafer Mapping
box Spacer Buffer / Transfer Lid Hoist
box Spacer 3Phase or Enhanced Cryopumps
box Spacer Through-the-Wall or Ballroom Style Installation