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Endura 5500
Centura 5200 / 5300

Spacer Broadway Engineering is a Leading Supplier of Refurbished Applied Materials® Equipment and Service for the Semiconductor Industry.

Broadway Engineering offers completely refurbished Applied Materials® Etch, CVD and PVD systems at a significant savings over the cost of a new unit, without sacrificing quality. All of our refurbished systems are guaranteed to meet or exceed the original published manufactured specifications. All of these systems include installation and warranty.

Broadway Engineering can supply many configurations of the following equipment:

Endura 5500
Centura 5200 / 5300

System mainframe types are:

RTP (Rapid Thermal Process)
DCVD (Dielectric CVD)
WCVD (Tungsten CVD)
Tungsten Etch Back
Dielectric Etch.

This also includes configuring your system to your specific wafer size with a variety of options.

Take a look and see what Broadway Engineering can offer you.



Applied Materials<sup>®</sup> Precision 5000
P5K Spacer
P5000 Processes
box Spacer ASP
box Spacer Sputter Etch
box Spacer Oxide Etch
box Spacer Poly Etch
box Spacer Nitride Etch
box Spacer Metal Etch
box Spacer TEOS, Doped / Undoped
box Spacer WCVD
box Spacer WSiX
box Spacer SACVD
P5000 Chambers
box Spacer ASP
box Spacer Mark II
box Spacer MxP, MxP+
box Spacer MxP+ Poly
box Spacer WxP
box Spacer DxZ
box Spacer WxZ
box Spacer Universal CVD
box Spacer WCVD
box Spacer Orienter Chamber
P5000 System Options
box Spacer Mark II Mainframe
box Spacer 8, 15, or 29 slot storage Elevator
box Spacer Phase III Robot and Cassette Handler
box Spacer Phase IV Hotbox
box Spacer PLIS
box Spacer Wafer Position System (W.P.S.)
box Spacer High Optical Throughput Endpoint System (H.O.T.)
box Spacer Monochromator Endpoint
box Spacer Through-the-Wall or Ballroom Style Installation
box Spacer Standard or Modular Remote Frame