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Products

Endura 5500
Centura 5200 / 5300
Precision 5000

Flat Panel Monitor
Storage Raid Array
Storage Raid Array With Backup
FDD-CF Upgrade

Dual-CF Upgrade

Spacer Broadway Engineering is a top tier supplier of Refurbished Applied Materials® Equipment and Service for the Semiconductor Industry.

Broadway Engineering offers completely refurbished Applied Materials® Etch, CVD and PVD systems at a significant savings over the cost of a new unit, without sacrificing quality. All of our refurbished systems are guaranteed to meet or exceed the original published manufactured specifications. All of these systems include installation and warranty.

Broadway Engineering can supply many configurations of the Endura 5500, Centura 5200 / 5300 and P5000. System mainframe types are: RTP (Rapid Thermal Process), DCVD (Dielectric CVD), WCVD (Tungsten CVD), Tungsten Etch Back and Dielectric Etch. This also includes configuring your system to your specific wafer size with a variety of options.

Take a look and see what Broadway Engineering can offer you.

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Applied Materials<sup>®</sup> Endura 5500
             
Endura 5500 Spacer
Endura PVD Processes
box Spacer Standard Aluminum (Al)
box Spacer Planarized Hot Aluminum
box Spacer (HTHU)
box Spacer Standard Titanium (Ti)
box Spacer Coherent Titanium (Coh Ti)
box Spacer Dedicated Titanium Nitride (TiN)
box Spacer Titanium / Titanium Nitride (TTN)
box Spacer Coherent Titanium / Titanium Nitride (Coh TTN)
box Spacer Titanium Tungsten (TiW)
box Spacer Tungsten (W)
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Endura Chambers
box Spacer Standard Body Chamber
box Spacer Wide Body PVD Chamber
box Spacer Water Cooled PVD Chamber
box Spacer Paste Chamber (Ch-5)
box Spacer Preclean I / II chamber
box Spacer Orienter / Degas Chamber
box Spacer PVD Degas Chamber
box Spacer Vectra IMP
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Endura System Options
box Spacer Specific Wafer Size Configuration
box Spacer Wide or Narrow Body Load Locks
box Spacer HP Motorized Lifts
box Spacer Single or Dual Orienter / Degas Chambers
box Spacer HP, HP+ or VHP Robots
box Spacer Fast Wafer Mapping
box Spacer Buffer / Transfer Lid Hoist
box Spacer 3Phase or Enhanced Cryopumps
box Spacer Through-the-Wall or Ballroom Style Installation

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Applied Materials<sup>®</sup> Centura 5200/5300
             
Centura 5200 / 5300 Spacer
Centura Processes
box Spacer ASP
box Spacer Sputter Etch
box Spacer Oxide Etch
box Spacer Poly Etch
box Spacer Nitride Etch
box Spacer DPS Poly or Metal Etch
box Spacer HDP-CVD
box Spacer TEOS, Doped / Undoped
box Spacer WCVD
box Spacer WSiX
box Spacer RTP
box Spacer PVD
box Spacer SACVD
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Centura Chambers
box Spacer ASP+
box Spacer Sputter Etch
box Spacer MxP
box Spacer MxP+
box Spacer eMxP+ and Super eMxP+
box Spacer DPS, R0/R1
box Spacer WxP
box Spacer DxZ
box Spacer WxZ
box Spacer HDP
box Spacer RTP (Mod 1), RTPxe
box Spacer Universal CVD
box Spacer Preclean II chamber
box Spacer Orienter / Degas Chamber
box Spacer Single / Multi Slot Cool Down Chamber
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Centura System Options
box Spacer Phase II Mainframe
box Spacer Centura II
box Spacer High Temp Mainframe
box Spacer Narrow or Wide Body Loadlock
Chambers
box Spacer On The Fly Center finder (OTF)
box Spacer Fast Wafer Mapping
box Spacer HP, HP+ or VHP Robots
box Spacer Transfer Lid Hoist
box Spacer High Optical Throughput Endpoint System (H.O.T.)
box Spacer Monochromator Endpoint
box Spacer Through the wall or Ballroom Style Installation

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Applied Materials<sup>®</sup> Precision 5000
             
P5000 Spacer
P5000 Processes
box Spacer ASP
box Spacer Sputter Etch
box Spacer Oxide Etch
box Spacer Poly Etch
box Spacer Nitride Etch
box Spacer Metal Etch
box Spacer TEOS, Doped / Undoped
box Spacer WCVD
box Spacer WSiX
box Spacer SACVD
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P5000 Chambers
box Spacer ASP
box Spacer Mark II
box Spacer MxP, MxP+
box Spacer MxP+ Poly
box Spacer WxP
box Spacer DxZ
box Spacer WxZ
box Spacer Universal CVD
box Spacer WCVD
box Spacer Orienter Chamber
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P5000 System Options
box Spacer Mark II Mainframe
box Spacer 8, 15, or 29 slot storage Elevator
box Spacer Phase III Robot and Cassette Handler
box Spacer Phase IV Hotbox
box Spacer PLIS
box Spacer Wafer Position System (W.P.S.)
box Spacer High Optical Throughput Endpoint System (H.O.T.)
box Spacer Monochromator Endpoint
box Spacer Through-the-Wall or Ballroom Style Installation
box Spacer Standard or Modular Remote Frame

 

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