Spacer Home Spacer Products Spacer Spares Spacer Services Spacer Cart Spacer Contact Spacer
Header
Spacer
Spacer
Services   Our Commitment to Quality and Service is Second to None
     

System

Open RTP

Chamber

Gasbox

Monolith

 

 

Re-configurations:
Our staff has the ability to re-configure your system to your exact specification. We are able to perform wafer size conversions on your system in the field as well as supply all of the required assemblies. We also provide Tier I and Tier II “BKM” qualification.

Field Service:
Broadway Engineering offers a wide variety of Service Contracts and PM contracts that can be custom tailored to meet individual customer requirements. We also support down machine service calls.

Training:

Broadway Engineering provides customers with both classroom and hands on instruction, using our Applied Materials® training tools. The class size is always small, with no more than 6 technicians per class, to provide the best-personalized service. Custom courses are available based on skill level, and can be conducted at our site or the customer's.

Chamber Retrofits:

As your production requirements change we can supply and install additional chambers to your existing system. The new chamber will be tested in our clean room on a system prior shipment in order to ensure a quick installation and qualification.

Gas Delivery Systems:
With our in house orbital welding capabilities, we are able to design, built and install custom gas panels. The gas panel can be configured for as many gases per chamber as required by your process parameters. This includes TEOS delivery systems such as G-PLIS, P-PLIS, and E-PLIS.

Exchange Program:

Broadway Engineering offers an exchange program on AMAT heat exchangers, lamp modules, robots, lift assemblies and more. All major sub-assemblies are thoroughly tested before shipment. Once the unit arrives, it is simply a matter of connecting the replacement unit and returning the old one. This process reduces system down time

CAD Design:

Broadway Engineering Engineering Department has CAD design capability using Solid Works software. Broadway Engineering has the ability to reverse engineer or assist you in the complete redesign of special parts needed for your systems.

BE_Footer

Spacer
Spacer