broadway engineering tools

Centura 5200 / 5300

Broadway Engineering offers completely refurbished Applied MaterialsĀ® Etch, CVD and PVD systems at a significant savings over the cost of a new unit, without sacrificing quality. All of our refurbished systems are guaranteed to meet or exceed the original published manufactured specifications. All of these systems include installation and warranty.

Broadway Engineering can supply many configurations of the Endura 5500, Centura 5200 / 5300 and P5000. System mainframe types are: RTP (Rapid Thermal Process), DCVD (Dielectric CVD), WCVD (Tungsten CVD), Tungsten Etch Back and Dielectric Etch. This also includes configuring your system to your specific wafer size with a variety of options.

  • Centura Processes

    • CVD Configurations
    • Etch Configurations
    • PVD Configurations
  • Centura Chambers

    • DxZ CVD
    • DCXZ CVD
    • HDP CVD
    • MxP /MxP+
    • DPS
  • Centura System Option

    • Wide or Narrow Body Load Locks
    • Single or Dual Orienter / Degas Chambers
    • HP, HP+ or VHP Robots
    • Fast Wafer Mapping