broadway engineering parts

Precision 5000

Broadway Engineering offers completely refurbished Applied MaterialsĀ® Etch, CVD and PVD systems at a significant savings over the cost of a new unit, without sacrificing quality. All of our refurbished systems are guaranteed to meet or exceed the original published manufactured specifications. All of these systems include installation and warranty.

Broadway Engineering can supply many configurations of the Endura 5500, Centura 5200 / 5300 and P5000. System mainframe types are: RTP (Rapid Thermal Process), DCVD (Dielectric CVD), WCVD (Tungsten CVD), Tungsten Etch Back and Dielectric Etch. This also includes configuring your system to your specific wafer size with a variety of options.

  • P5000 Processes

    • CVD Processes
    • Etch Processes
  • P5000 Chambers

    • Lamp Heated
    • xZ heated
    • MxP /MxP+
  • P5000 System Option

    • Specific Wafer Size Configuration
    • Clear Wafer Setup
    • Upgraded Robot options